完美的世界 1993 电影,完美世界辰东

Process Application

-MOCVD wafer automatic loading and unloading
Robot Models

-GBT-P7A-700 (More)
System Composition

-Two SCARA robots and one articulated robot are integrated with the preceding equipment to facilitate the loading and unloading process for both processed and unprocessed wafers.
Economic Benefits Achieved by Clients

-Cost reduction, increased capacity and efficiency
-Ensured labor cost savings and production stability
Key Technologies

-Robots certified for use in a dust-free environment, meeting national cleanliness requirements
-Equipped with high-speed I/O for wafer mapping inspection
-High stability ensures gentle wafer handling and tray placement without collisions
Competitive Edges

-Wafer positioning accuracy: ±0.05mm、±0.1°
-Wafer loading and unloading Cycle Time: 425pcs/h
-High Position Repeatability (Position repeatability: 0.02mm), ensuring damage
-free during wafer loading and unloading -Jitter-free in high-speed wafer handling for efficient loading and unloading
-Yield Rate: ≥99.9%