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Home - Success Cases - Semiconductor & Photovoltaics - PVD Wafer Automatic Loading and Unloading
PVD Wafer Automatic Loading and Unloading
  • Process Application

    PVD wafer automatic loading and unloading

  • Robot Models

    -GBT-P7A-700  (More) 

    -GBT-S3A-400-C  (More) 

    -GBT-S6A-600-C  (More)

  • System Composition

    -Wafer detection Mapping system 

    -Automatic disk edge finding  system 

    -Automatic wafer loading and unloading system

  • Economic Benefits Achieved by Clients

    -Yield rate≥99.5% 

    -Wafer loading capacity：288pcs/h

  • Key Technologies

    -Robots certified for use in a dust-free environment, meeting national cleanliness requirements 

    -Equipped with high-speed I/O for wafer mapping inspection 

    -High stability ensures gentle wafer handling and tray placement without collisions

  • Competitive Edges

    -High Position Repeatability (Position repeatability: 0.02mm), ensuring damage-free during wafer loading and unloading 

    -Jitter-free in high-speed wafer handling for efficient loading and unloading 

    -High flexibility, compatibility, stability and ease of operation

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